This series of power supplies are designed for continuous use in a vacuum environment and are mainly used as DC magnetron sputtering drives. High regulation, low stored energy and efficient arc sustaining make these units ideal for laboratory and industrial use.
| PARAMETER | SPECIFICATION |
|---|---|
| Input Voltage | 230V ±10% AC, 50Hz, single phase / 415V ±10% AC, 50Hz, three phase |
| Output Voltage Range* | 1kV DC |
| Output Power Range* | 1kW / 2kW / 5kW |
| Polarity* | Positive / Negative |
| Line Regulation | Upto 0.05% for ±10% variation in input voltage |
| Load Regulation | Upto 0.1% for 0 to 100% load variation |
| Stability | < 0.01%/hour after 1 hour warm up |
| Temperature Coefficient | <0.1%/ºC |
| Regulating Mode* | Constant voltage – constant current |
| Voltage & Current Control | By 10-turn potentiometers on the front panel from zero to maximum output rating |
| Remote Controls & Signals through Pluggable Connector (analog signals) / D-Connector (External RS232 Microcontroller Module for Remote Operation) | 10V DC reference 10V DC HV enable signal 0 to 10V DC signal for voltage & current control 0 to 10V DC signal for voltage & current monitoring |
| Cooling | Forced air |
| Protections* | Against over load, arc and short-circuit |
| Front Panel | Power ON/OFF switch / MCB with indication HV ON/OFF switch with indication 3½ digit voltage and current meters 10-turn potentiometers for voltage and current control Constant voltage – constant current mode indication |
| Back Panel | Socket for mains input with 250V, 20A 3 conductor power cord of 1.5 meters / Terminal block for 3 phase inputs Fuse holder with fuse Terminal for HV output with 10ft of detachable high voltage cable Stud for grounding the unit Remote interface connector# |
| Topology | High frequency resonant / PWM-controlled switch mode |
| Switching Device | IGBT |
| Cabinet | 19” rack, powder coated |
*Optional. To be specified by the user.
| Pins | 14 Pin Pluggable Connector (Analog Interface) | 25 Pin D Connector (PC Interface) |
|---|---|---|
| 1 | Earth | Earth |
| 2 | Common | Common |
| 3 | Interlock | HV Enable |
| 4 | HV Enable | Voltage Control Remote |
| 5 | Reference | Current Control Remote |
| 6 | Common | Over Voltage Control Remote* |
| 7 | Voltage Control Remote | Over Current Control Remote* |
| 8 | Voltage Control Local | Common |
| 9 | Common | Voltage Monitor |
| 10 | Current Control Remote | Current Monitor |
| 11 | Current Control Local | Reserved Monitor* |
| 12 | Common | Reserved Monitor* |
| 13 | Voltage Monitor | Common |
| 14 | Current Monitor | +Mode Status |
| 15 | Interlock Status | |
| 16 | HV ON Status | |
| 17 | Common | |
| 18 | PS Fault Status* | |
| 19 | Over Voltage Status* | |
| 20 | Over Current Status* | |
| 21 | Over Temperature Status* | |
| 22 | Open Circuit Status* | |
| 23 | Phase Failure Status* | |
| 24 | Reserved Status* | |
| 25 | Common |
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